F00200 - SEMI F2 - Specification for 316L Stainless Steel Tubing for General Purpose Semiconductor Manufacturing Applications Revision:SEMI F2-94 (Withdrawn 0703) - Withdrawn FPD用カラーフィルタの，光に対する耐性の測定方法を標準化することを目的とする。

FPD用カラーフィルタの，光に対する耐性の測定方法を標準化することを目的とする。

capacity ramp

peeling speed etc

for p-type

F00200 - SEMI F2 - Specification for 316L Stainless Steel Tubing for General Purpose Semiconductor Manufacturing Applications Revision:SEMI F2-94 (Withdrawn 0703) - Withdrawn FPD用カラーフィルタの，光に対する耐性の測定方法を標準化することを目的とする。NOTICE: This Document was balloted and approved for withdrawal in 2003. The purpose of this Specification is to identify the applicable ASTM tubing specification requirements and to define the special material chemical composition requirements for 316L stainless steel tubing which is to be used for general purpose applications in semiconductor manufacturing facilities. This Specification covers grades of nominal wall thickness stainless steel tubing